@article{169616,
  author = {E Jablonski and S Sambasivan and Eric Lin and Daniel Fischer and C Devadoss and R Puligadda},
  title = {Near Edge X-Ray Absorption Fine Structure Measurements of the Interface between Bottom Antireflective Coatings and a Model Deprotected Photoresist},
  year = {2003},
  number = { 21(6)},
  month = {2003-01-01},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853911},
  language = {en},
}