@conference{169596,
  author = {W Sakai and C. Chiang},
  title = {Dielectric Properties of Multi-layer High-k Composite Films},
  year = {2002},
  month = {2002-01-01},
  publisher = {Symposium Proceedings of Materials Research Society, Boston, MA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853840},
  language = {en},
}