@conference{169411,
  author = {T Hu and Ronald Jones and Wen-Li Wu and Christopher Soles and Eric Lin and M Arpan and D Casa},
  title = {Fast Evaluation of Next-Generation Lithographical Patterns by Small Angle X-Ray Scattering},
  year = {2003},
  number = {44},
  month = {2003-09-01},
  publisher = {American Chemical Society, Division of Polymer Chemistry, National Meeting | 26th | 26th ACS National Meeting | American Chemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852191},
  language = {en},
}