@article{169336,
  author = {Christopher Soles and Eric Lin and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Ronald Jones and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Thin Film Confinement Effects on the Thermal Properties of Model Photoresist Polymers},
  year = {2001},
  number = {19},
  month = {2001-12-01},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851889},
  language = {en},
}