@conference{168826,
  author = {Jan Obrzut and R Nozaki},
  title = {TDR Permittivity Measurements of Dielectric Films},
  year = {2006},
  month = {2006-05-15},
  publisher = {Instrumentation and Measurement Technology Conference, 2006, IMTC 2006, Proceedings of the IEEE, Sorento, IT},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852848},
  language = {en},
}