@conference{16876,
  author = {Joseph Kopanski and Lin You and Jungjoon Ahn and Emily Hitz and Yaw Obeng},
  title = {Scanning Probe Microscopes for Subsurface Imaging},
  year = {2014},
  number = {61},
  month = {2014-05-11},
  publisher = {Electrochemical Society Transactions,Proceedings of the Symposium on Dielectrics for Nanosystems 6:  Materials Science, Processing, Reliability, and Manufacturing, Orlando, FL},
  doi = {https://doi.org/10.1149/06102.0185ecst},
  language = {en},
}