@conference{168696,
  author = {R Hedden and V. Lee and Barry Bauer and Christopher Soles and Wen-Li Wu and Eric Lin},
  title = {Measurement of Pore Size and Matrix Characteristics in Low-Κ Dielectrics by Neutron Contrast Variation},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {Characterization and Metrology for ULSI Technology, Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852162},
  language = {en},
}