@article{168386,
  author = {Eric Lin and Sushil Satija and Wen-Li Wu and Christopher Soles and D Goldfarb and B Trinque and S Burns and Ronald Jones and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and M Angelopoulos and C Willson},
  title = {Direct Measurement of the Reaction Front in Chemically Amplified Photoresists},
  year = {2002},
  number = {297},
  month = {2002-07-01},
  publisher = {Science},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852012},
  language = {en},
}