@article{168346,
  author = {Hae-Jeong Lee and Hyun and Christopher Soles and Ronald Jones and Eric Lin and Wen-Li Wu and Daniel Hines},
  title = {Effect of Initial Resist Thickness on Residual Layer Thickness of Nanoimprinted Structures},
  year = {2005},
  number = {23(6)},
  month = {2005-12-01},
  publisher = {Journal of Vacuum Science and Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852524},
  language = {en},
}