@article{168331,
  author = {T Hu and Ronald Jones and Wen-Li Wu and Eric Lin and Q Lin and D Keane and Steven Weigand and J Quintana},
  title = {Small Angle X-Ray Scattering Metrology for Sidewall Angle and Cross Section of Nanometer Scale Line Gratings},
  year = {2004},
  number = {96},
  month = {2004-08-01},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852323},
  language = {en},
}