@conference{168251,
  author = {Ronald Jones and Christopher Soles and Eric Lin and Walter Hu and R Reano and Stella Pang and Steven Weigand and D Keane and John Quintana},
  title = {Pattern Fidelity in Nanoimprinted Films Using Cd-Saxs},
  year = {2005},
  month = {2005-01-01},
  publisher = {Proceedings of the Spie 2005: Microlithography, San Jose, CA.},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853997},
  language = {en},
}