@article{168061, author = {Abhishek Motayed and A Davydov and Mark Vaudin and John Melngailis and S. Mohammad}, title = {Fabrication of GaN-based Nanoscale Device Structures Utilizing Focused Ion Beam Induced Pt Deposition}, year = {2006}, number = {100}, month = {2006-07-15}, publisher = {Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854231}, language = {en}, }