@article{168006,
  author = {Vivek Prabhu and S Sambasivan and Daniel Fischer and Linda Sundberg and Robert Allen},
  title = {Quantitative depth profiling of photoacid generators in photoresist materials by near-edge x-ray absorption fine structure spectroscopy},
  year = {2006},
  number = {253},
  month = {2006-11-15},
  publisher = {Applied Surface Science},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854199},
  language = {en},
}