@conference{167981,
  author = {Christopher Soles and Eric Lin and Wen-Li Wu and Q Lin and M Angelopoulos},
  title = {Confinement Induced Deviation in Ultra-thin Photoresist Films},
  year = {2001},
  month = {2001-01-01},
  publisher = {Proceedings of the 12th International Conference on Photopolymers,  Brookfield, CT},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853792},
  language = {en},
}