@conference{167856,
  author = {Christopher Soles and Ronald Jones and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Vivek Prabhu and Wen-Li Wu and Eric Lin and D Goldfarb and M Angelopoulos},
  title = {Polymer Dynamics and Diffusive Properties in Ultra-Thin Photoresist Films},
  year = {2003},
  number = {5039},
  month = {2003-02-01},
  publisher = {Advanced Environmental and Chemical Sensing Technology, Coference | 20th | | SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852201},
  language = {en},
}