@conference{167401,
  author = {Chad Snyder and F Mopsik},
  title = {High Sensitivity Technique for Measurement of Thin Film Out-of-Plane Expansion},
  year = {1998},
  number = {449},
  month = {1998-03-01},
  publisher = {Characterization and Metrology for ULSI Technology: 1998 International Conference},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851423},
  language = {en},
}