@article{167381,
  author = {Chengqing Wang and J Roberts and Robert Bristol and B Bunday and Ronald Jones and Eric Lin and Wen-Li Wu and John Villarrubia and Kwang-Woo Choi and James Clarke and Bryan Rice and Michael Leeson},
  title = {Line Edge Roughness Characterization of Sub-50nm Structures Using CD-SAXS: Round-Robin Benchmark Results},
  year = {2007},
  number = {263},
  month = {2007-01-01},
  publisher = {SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852720},
  language = {en},
}