@article{167331, author = {Peter Schenck and Nabil Bassim and Makoto Otani and Hiroyuki Oguchi and Martin Green}, title = {Design and Spectroscopic Reflectometry Characterization of Pulsed Laser Deposition Combinatorial Libraries}, year = {2007}, number = {254}, month = {2007-11-30}, publisher = {Applied Surface Science}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854361}, language = {en}, }