@article{167151,
  author = {Christopher Soles and Jack Douglas and Eric Lin and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Ronald Jones and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Incoherent Neutron Scattering and the Dynamics of Thin Film Photoresist Polymers},
  year = {2003},
  number = {93},
  month = {2003-02-01},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852097},
  language = {en},
}