@article{167061,
  author = {H Kim and Wen-Li Wu and Barry Bauer and Eric Lin and J Kim and Y Kim and V. Lee},
  title = {Structural Characterization of Porous Low-k SiOC Thin Films Using Novel X-Ray Porosimetry},
  year = {2002},
  number = {60(1)},
  month = {2002-01-01},
  publisher = {Proceedings of the IEEE International Interconnect Technology Conference},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851998},
  language = {en},
}