@misc{166621,
  author = {Ronald Jones and Eric Lin and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Christopher Soles and Wen-Li Wu},
  title = {Controlling Morphology During Pattern Development in Thin Film Photoresists},
  year = {2002},
  month = {2002-02-01},
  publisher = {Controlling Morphology During Pattern Development in Thin Film Photoresists},
  language = {en},
}