@conference{165706,
  author = {R Hedden and Barry Bauer and Hae-Jeong Lee},
  title = {Characterization of Nanoporous Low-k Thin Films by Contrast Match SANS},
  year = {2003},
  number = {766},
  month = {2003-04-01},
  publisher = {Materials Research Society Symposia Proceedings | | Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectricx--2003: 2003 Mrs Spring Meeting | Materials Research Society},
  language = {en},
}