@misc{165476,
  author = {Frank Gayle},
  title = {Micro- and Optoelectronics Materials Science and Engineering Laboratory Annual Report FY 2002},
  year = {2003},
  month = {2003-03-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}