@conference{164916,
  author = {Eric Lin and Wen-Li Wu and C Jin and J Wetzel},
  title = {Structure and Property Characterization of Porous Low-k Dialectric Constant Thin Films Using X-ray Reflectivity and Small Angle Neutron Scattering},
  year = {2001},
  number = {612},
  month = {2001-04-01},
  publisher = {Materials, Technology and Reliability for Advance Interconnects and Low-k Dielectrics | | | Materials Research Society},
  language = {en},
}