@misc{164846, author = {Richard Gates and Stephen Hsu}, title = {Measurement/Calibration Technique for Nanometer Scale Average Film Thickness on Atomically Rough Surfaces Developed}, year = {2003}, number = {108}, month = {2003-09-01}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }