@conference{164606,
  author = {T Hu and Ronald Jones and Eric Lin and Wen-Li Wu},
  title = {Line-Edge Roughness and Side-Wall Angle Measurements of Nanoscale Patterns by Small Angle X-Ray Scattering},
  year = {2004},
  month = {2004-02-01},
  publisher = {Sigma Xi Postdoctoral Poster Presentations, 2004},
  language = {en},
}