@conference{164431,
  author = {Hae-Jeong Lee and Christopher Soles and Da-Wei Liu and Barry Bauer and Eric Lin and Wen-Li Wu},
  title = {Structural Characterization of Methylsilsequioxane-Based Porous Low-k Thin Films Using X-Ray Porosimetry},
  year = {2003},
  month = {2003-06-01},
  publisher = {International Interconnect Technology Conference | 6th |},
  language = {en},
}