@conference{164311,
  author = {Hae-Jeong Lee and B Vogt and Christopher Soles and Da-Wei Liu and Barry Bauer and Wen-Li Wu and Eric Lin and Gwi-Gwon Kang and Min-Jin Ko},
  title = {X-Ray and Neutron Porosimetry as Powerful Methodologies for Determining Structural Characteristics of Porous Low-k Thin Films},
  year = {2004},
  month = {2004-06-01},
  publisher = {IEEE International Interconnect Technology Conference|7th| International Interconnect Technology|IEEE},
  language = {en},
}