@article{163376,
  author = {Yeon-Gil Jung and Brian Lawn and M Martyniuk and H Huang and X Hu},
  title = {Evaluation of Elastic Modulus and Hardness of Thin Films By Nanoindentation},
  year = {2004},
  number = {19},
  month = {2004-10-01},
  publisher = {Journal of Materials Research},
  language = {en},
}