@conference{163281,
  author = {John Bonevich and Robert McMichael and Chang Lee and P Chen and W and William Egelhoff},
  title = {Large Anisotropy Via Oblique Sputtering of Ta Underlayers},
  year = {2001},
  number = {614},
  month = {2001-05-01},
  publisher = {Magnetic Materials, Structures and Processing for Information Storage, Symposium |  | Magnetic Materials, Structures and Processing for Information Storage | Materials Research Society},
  language = {en},
}