@article{163026,
  author = {Igor Levin and Richard Leapman and M Kovler and Y Roizin},
  title = {Radiation-Induced Nitrogen Segregation During Electron Energy Loss Spectroscopy of Silicon Oxide-Nitride-Oxide Stacks},
  year = {2003},
  number = {83},
  month = {2003-08-01},
  publisher = {Applied Physics Letters},
  language = {en},
}