@article{162786,
  author = {Yeon-Gil Jung and Antonia Pajares and Brian Lawn},
  title = {Effect of Oxide and Nitride Films on Strength of Silicon: A Study Using Controlled Small-Scale Flaws},
  year = {2004},
  number = {19},
  month = {2004-12-01},
  publisher = {Journal of Materials Research},
  language = {en},
}