@conference{160561, author = {Donna Hurley and J Wiehn and J Turner and Paul Rice}, title = {Quantitative Elastic-Property Information With Acoustic AFM: Measurements and Modeling}, year = {2002}, number = {4703}, month = {2002-06-01}, publisher = {Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems | | Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems | SPIE}, language = {en}, }