@conference{159561,
  author = {Gery Stafford and Thomas Moffat and V Jovic and David Kelley and John Bonevich and Daniel Josell and Mark Vaudin and N Armstrong and W Huber and A Stanishevsky},
  title = {Cu Electrodeposition for On-Chip Interconnections},
  year = {2001},
  number = {550},
  month = {2001-01-01},
  publisher = {Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology},
  language = {en},
}