@article{159131,
  author = {Kristine Bertness and C Wang and Marc Salit and Gregory Turk and Therese Butler and Albert Paul and Lawrence Robins},
  title = {High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy},
  year = {2006},
  number = {24},
  month = {2006-09-01},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}