@conference{158781,
  author = {B Vogt and Christopher Soles and Ronald Jones and Vivek Prabhu and Wen-Li Wu and Eric Lin},
  title = {Water Absorption in Thin Photoresist Films},
  year = {2004},
  month = {2004-02-01},
  publisher = {Sigma Xi Postdoctoral Poster Presentations, 2004},
  language = {en},
}