@article{15861,
  author = {Martin Sandberg and Jeffrey Kline and Martin Weides and David Wisbey and David Pappas},
  title = {Etch induced microwave losses in titanium nitride superconducting resonators},
  year = {2012},
  number = {100},
  month = {2012-06-25},
  publisher = {Applied Physics Letters},
  doi = {https://doi.org/10.1063/1.4729623},
  language = {en},
}