@conference{158531,
  author = {E Jablonski and Vivek Prabhu and S Sambasivan and Daniel Fischer and Eric Lin and D Goldfarb and M Angelopoulos and H Ito},
  title = {Surface Effects in Chemically Amplified Photoresists: Environmental Stability and Segregation},
  year = {2004},
  month = {2004-02-01},
  publisher = {Sigma Xi Postdoctoral Poster Presentations, 2004},
  language = {en},
}