@article{15656, author = {Chukwudi Okoro and Lyle Levine and Ruqing Xu and Klaus and Yaw Obeng}, title = {Synchrotron-Based Measurement of the Impact of Thermal Cycling on the Evolution of Stresses in Cu Through-Silicon Via}, year = {2014}, number = {115}, month = {2014-06-30}, publisher = {Journal of Applied Physics}, doi = {https://doi.org/10.1063/1.4885461}, language = {en}, }