@conference{156156,
  author = {B am and Michael Cresswell and Richard Allen and T Headley and William Guthrie and Loren Linholm and H Bogardus and Christine Murabito},
  title = {Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis},
  year = {2002},
  number = {15},
  month = {2002-04-01},
  publisher = {Proceedings of the IEEE International Conference on Microelectronic Test Structures, Cork, UK},
  language = {en},
}