@article{154351,
  author = {Kevin Coakley and Huaiyu Chen-Mayer and George Lamaze and David Simons and P Thompson},
  title = {Calibration of a Stopping Power Model for Silicon Based on Analysis of Neutron Depth Profiling and Secondary Ion Mass Spectrometry Measurements},
  year = {2002},
  number = {192},
  month = {2002-06-01},
  publisher = {Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms},
  language = {en},
}