@article{151671,
  author = {R Walton and Richard Cavicchi and Stephen Semancik and B Panchapakesan and Don DeVoe and M Aquino-Class and J Allen and John Suehle},
  title = {Solid State Gas Microsensors for Environmental and Industrial Monitoring},
  year = {1999},
  month = {1999-01-01},
  publisher = {Proceedings of SPIE},
  language = {en},
}