@article{150426,
  author = {John Gillen and J Batteas and Chris Michaels and P Chi and John Small and Eric Windsor and Albert Fahey and Jennifer Verkouteren and W Kim},
  title = {Depth Profiling Using C<sub>60</sub>+ SIMS Deposition and Topography Development During Bombardment of Silicon},
  year = {2006},
  month = {2006-07-30},
  publisher = {Applied Surface Science},
  language = {en},
}