@conference{148361,
  author = {Charles Tarrio and Robert Vest and S Grantham},
  title = {Absolute EUV Metrology,},
  year = {2001},
  number = {4450},
  month = {2001-01-01},
  publisher = {Harnessing Light: Optical Science and Metrology at NIST , San Diego, CA},
  language = {en},
}