@article{144696,
  author = {Charles Tarrio and Robert Vest and Steven Grantham and Thomas Lucatorto},
  title = {Extreme-Ultraviolet Metrology at SURF III,},
  year = {2001},
  number = {14},
  month = {2001-01-01},
  publisher = {Synchrotron Radiat News Page},
  language = {en},
}