@conference{144456,
  author = {Shannon Hill and I Ermanoski and Steven Grantham and Charles Tarrio and Thomas Lucatorto and T. Madey and Sasa Bajt and M Chandhok and P Yan and Obert Wood and S Wurm and N Edwards},
  title = {EUV testing of multilayer mirrors: critical issues},
  year = {2006},
  number = {S},
  month = {2006-01-01},
  publisher = {Emerging Lithographic Technologies X , San Jose, CA},
  language = {en},
}