@conference{144116,
  author = {Eric Benck and J Roberts},
  title = {Optical computer aided tomography for plasma uniformity measurements},
  year = {1998},
  month = {1998-06-01},
  publisher = {The Fourth International Workshop on Advanced Plasma Tools and Process Engineering , Millbrae, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=101927},
  language = {en},
}