@book{143911,
  author = {John Bridges and Jonathan Hardis and C Cromer and J Roberts},
  title = {Spectroradiometers for Deep-Ultraviolet Lithography, ed. by W.M. Bullis, D.G. Seiler, and A.C. Diebold},
  year = {1996},
  month = {1996-01-01},
  publisher = {  AIP, New York, NY},
  language = {en},
}