@article{140946, author = {R Watts and Charles Tarrio and Thomas Lucatorto and R Madden and R Deslattes and Estler Caticha and C Evans and T Mcwaid and Jing Fu and T Vorburger}, title = {XUV Optics Characterization at NIST}, year = {1993}, number = {79}, month = {1993-01-01}, publisher = {Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms}, language = {en}, }