@article{139746, author = {J Pedulla and R Deslattes and K Joensen and P Gorenstein}, title = {Characterizing Surfaces and Overlying Multilayer Structures Using Grazing Incidence X-Ray Reflectivity}, year = {1996}, number = {403}, month = {1996-01-01}, publisher = {Materials Research Society Symposium Proc - Polycrystalline Thin Films II Symposium I}, language = {en}, }